Onto Innovation Inc.

Form 5500

ONTO INNOVATION, INC.

PO Box 860, Budd Lake, Nj 07828 (973) 448-4310 EIN:94-2276314 Plan Admin:Danielle Zinck

Year	Plan Name	Participants BOY/EOY	Assets BOY/EOY
2022	Plan NameONTO INNOVATION, INC. 401(K) SAVINGS PLAN Plan #002 Participants BOY/EOY1,265 / 1,417 Assets BOY/EOY$222,724,152 / $190,774,975	2022	ONTO INNOVATION, INC. 401(K) SAVINGS PLAN - Plan #002	1,265 / 1,417	$222,724,152 / $190,774,975
2021	Plan NameONTO INNOVATION, INC. 401(K) SAVINGS PLAN Plan #002 Participants BOY/EOY1,147 / 1,265 Assets BOY/EOY$195,162,023 / $222,724,152	2021	ONTO INNOVATION, INC. 401(K) SAVINGS PLAN - Plan #002	1,147 / 1,265	$195,162,023 / $222,724,152
2020	Plan NameONTO INNOVATION, INC. 401(K) SAVINGS PLAN Plan #002 Participants BOY/EOY580 / 1,147 Assets BOY/EOY$93,674,540 / $195,162,023	2020	ONTO INNOVATION, INC. 401(K) SAVINGS PLAN - Plan #002	580 / 1,147	$93,674,540 / $195,162,023