Entegris, Inc.

Form 5500

ENTEGRIS, INC.

117 Jonathan Blvd N, Chaska, Mn 55318 (952) 556-3131 EIN:41-1941551 Plan Admin:Lori Kotars

Year	Plan Name	Participants BOY/EOY	Assets BOY/EOY
2022	Plan NameENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN Plan #002 Participants BOY/EOY4,668 / 5,479 Assets BOY/EOY$564,475,038 / $467,862,183	2022	ENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN - Plan #002	4,668 / 5,479	$564,475,038 / $467,862,183
2021	Plan NameENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN Plan #002 Participants BOY/EOY3,791 / 4,668 Assets BOY/EOY$478,945,340 / $564,475,038	2021	ENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN - Plan #002	3,791 / 4,668	$478,945,340 / $564,475,038
2020	Plan NameENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN Plan #002 Participants BOY/EOY3,335 / 3,791 Assets BOY/EOY$404,678,339 / $478,945,340	2020	ENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN - Plan #002	3,335 / 3,791	$404,678,339 / $478,945,340
2019	Plan NameENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN Plan #002 Participants BOY/EOY3,275 / 3,335 Assets BOY/EOY$320,163,681 / $404,678,339	2019	ENTEGRIS, INC. 401K SAVINGS & PROFIT SHARING PLAN - Plan #002	3,275 / 3,335	$320,163,681 / $404,678,339